Linear evaporating device for the deposition of sputtering materials on substrates, comprises a heatable primary evaporator and/or a long stretched heatable steam distributor conductively connected with the primary evaporator

摘要

The linear evaporating device for the deposition of sputtering materials on substrates, comprises a heatable primary evaporator and/or a long stretched heatable steam distributor conductively connected with the primary evaporator. The steam distributor has a series of linearly arranged steam outlet openings (7). The steam distributors comprise a non-circular distributor tube (2), which has a flattened surface portion (4) and a quadratic cross-section, and the steam outlet openings are arranged along a margin of the flattened surface portion. The linear evaporating device for the deposition of sputtering materials on substrates, comprises a heatable primary evaporator and/or a long stretched heatable steam distributor conductively connected with the primary evaporator. The steam distributor has a series of linearly arranged steam outlet openings (7). The steam distributors comprise a non-circular distributor tube (2), which has a flattened surface portion (4) and a quadratic cross-section, and the steam outlet openings are arranged along a margin of the flattened surface portion. The two flattened surface portions are arranged to each other so that the angle of the surface portion is = 120[deg] , and the steam outlet openings are arranged between the two flattened surface portions. An intermediate region (6) is arranged between the two flat surface portions, and the steam outlet openings are arranged in the intermediate region. The distributor tubes are arranged in its longitudinal axes running parallel to each other in such a way that the direction of the openings overlaps itself in a distance of 100 mm from the distributor tubes. An independent claim is included for a method for co-evaporation of two substances for producing mixed layer.