Station for drying and/or degassing e.g. vaccine, or photomask transport chamber e.g. face opening unified pod transport chamber, has gas species analyzer comprising output signal for determining advancement characteristics parameter

摘要

The station (1) has a sealed chamber (2) receiving a substrate transport chamber (3). A pumping device (6) includes a gas inlet port (7) connected to the sealed chamber. A central processing unit (9) controls an advancement characteristics parameter of drying and/or degassing of the transport chamber. Output signal of a gas species analyzer (10) is related to operation of the central processing unit for determining the advancement characteristics parameter of drying and/or degassing of the transport chamber. The gas species analyzer is a hygrometer or a volatile organic compound trace detector. An independent claim is also included for a method for drying and/or degassing a product or a transport chamber to transfer and atmospheric-store a substrate.