Capacitive micro-electro-mechanical system for multimeter in electrical metrology field, has electrodes configured to obtain quadratic variation of capacity between electrodes based on relative displacement of electrodes

摘要

The system has a triangular movable electrode (E4) movable with respect to a triangular fixed electrode (E3), where the electrodes are in the form of combs. The electrodes are actuated by sinusoidal alternating current (Irms), where frequency of the alternating current is higher than resonance frequency of a mechanical system. The electrodes are configured to obtain quadratic variation of capacity between the electrodes based on relative displacement (x) of the electrodes. The movable electrode is suspended above the fixed electrode by a spring (R2) having characteristics stiffness.