Brief description of the excitation of a mobile element of a microstructure

摘要

The present invention relates to a process for the excitation of a resonant element (14) of a microstructure, this element being movable along a degree of freedom. The method comprises a step of application of a beam of charged particles (51) on said microstructure, the beam being configured so as to cause the element according to a reciprocating movement according to its degree of freedom.