CALIBRATION SYSTEM OF SPECTROSCOPIC APPARATUS, CALIBRATION METHOD, SPECTROSCOPIC SYSTEM, AND SPECTROSCOPIC METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technique for highly accurately calibrating a spectroscopic apparatus by using frequency comb light, and to provide a spectroscopic technique for performing highly accurate spectroscopy by using the calibrated spectroscopic apparatus.;SOLUTION: Light from a frequency-stabilized light source is made incident on a frequency shifter, a plurality of frequency-shifted light beams are successively emitted from the frequency shifter in accordance with a frequency shift quantity setting value, and frequency comb light beams in which a comb frequency interval is highly accurately set and of which the center angle frequencies are mutually different are successively generated from a frequency comb light generator and successively made incident on the spectroscopic apparatus in each different frequency shift quantity setting value. In each of two adjacent specific combs, optical spectra of a plurality of frequency-shifted combs are successively detected at a predetermined sampling frequency interval, and optical spectral data of the plurality of frequency-shifted combs in each of the two adjacent specific combs are acquired from the spectroscopic apparatus to perform frequency calibration operation.;COPYRIGHT: (C)2012,JPO&INPIT