首页> 外国专利> ANTENNA CARRIER, ARRAY ANTENNA TYPE PLASMA CVD DEVICE, AND METHOD FOR INSTALLING ARRAY ANTENNA UNIT OF ARRAY ANTENNA TYPE PLASMA CVD DEVICE

ANTENNA CARRIER, ARRAY ANTENNA TYPE PLASMA CVD DEVICE, AND METHOD FOR INSTALLING ARRAY ANTENNA UNIT OF ARRAY ANTENNA TYPE PLASMA CVD DEVICE

机译:天线载体,阵列天线型等离子体CVD装置以及安装阵列天线型等离子体CVD装置的阵列天线单元的方法

摘要

PROBLEM TO BE SOLVED: To simplify the maintenance work of an array antenna unit.;SOLUTION: An antenna carrier holding the array antenna unit 30 and movable in a vacuum chamber 1 includes: a pair of supports 75a and 75b holding the array antenna unit 30 in such a state as to droop a plurality of pole bolts 51 and 52; and a regulating member 78 suspended between the pair of supports 75a and 75b and positioned along a longitudinal direction matched with the alignment direction of the pole bolts 51 and 52 of the unit 30. The regulating member 78 has an extension part 78a extending to the alignment direction of the pole bolts 51 and 52 of the unit 30, and a movement restriction part 78b which protrudes from the extension part 78a to a direction crossing the longitudinal direction of the extension part 78a and faces the adjacent pole bolts 51 and 52. The movement restriction part 78b is provided in an evacuating manner from the facing side of the pole bolts 51 and 52 by sliding to the direction crossing the longitudinal direction of the extension part 78a.;COPYRIGHT: (C)2012,JPO&INPIT
机译:解决的问题:为了简化阵列天线单元的维护工作;解决方案:保持阵列天线单元30并在真空室1中移动的天线载体包括:一对支撑阵列天线单元30的支撑75a和75b。在使多个极螺栓51和52下垂的状态下;调节构件78悬挂在一对支撑件75a和75b之间,并沿与单元30的极螺栓51和52的对准方向匹配的纵向方向定位。调节构件78具有延伸到对准位置的延伸部78a。单元30的磁极螺栓51和52的方向,以及从延伸部78a向与延伸部78a的长度方向交叉的方向突出并与相邻的磁极螺栓51和52面对的移动限制部78b。限制部78b通过向与延伸部78a的长度方向交叉的方向滑动而从极螺栓51、52的相对侧抽真空设置。版权所有:(C)2012,JPO&INPIT

著录项

  • 公开/公告号JP2012158803A

    专利类型

  • 公开/公告日2012-08-23

    原文格式PDF

  • 申请/专利权人 IHI CORP;

    申请/专利号JP20110019168

  • 发明设计人 OGAWA HIROYUKI;CHISHINA HIROTSUGU;

    申请日2011-01-31

  • 分类号C23C16/509;H01L21/205;

  • 国家 JP

  • 入库时间 2022-08-21 17:44:24

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