MATERIAL GAS CONTROL APPARATUS, MATERIAL GAS CONTROL METHOD, MATERIAL GAS CONTROL PROGRAM AND MATERIAL GAS CONTROL SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a material gas control apparatus that prevents materials in abundance from going out of control at an early stage because of, for example, full opening of a valve.SOLUTION: The material gas control apparatus includes: a first valve 1 disposed in an outlet pipe L2; a concentration measurement mechanism CS for measuring a concentration of a material gas in a mixed gas; a first valve control section 24 for controlling the degree of opening of the first valve 1 such that the measured concentration of the material gas measured by the concentration measurement mechanism CS is a preset setting concentration; a second valve 32 disposed in an inlet pipe L1; and a second valve control section for, when the degree of opening of the first valve 1 is a threshold degree of opening smaller than a full degree of opening by a first predetermined value, controlling the degree of opening of the second valve 32 in a predetermined time to a changed degree of opening larger by a second predetermined value than the degree of opening at the time when the degree of opening of the first valve 1 has reached the threshold degree of opening.