TREATING LIQUID FOR ANALYSIS OF HIGH PURITY ORGANOMETALLIC COMPOUND AND ANALYSIS METHOD OF TRACE IMPURITY USING THE TREATING LIQUID, AND HIGH PURITY ORGANOMETALLIC COMPOUND THROUGH THE ANALYSIS

摘要

PROBLEM TO BE SOLVED: To provide a treating liquid for analysis of a high purity organometallic compound suitable for using in analysis of trace decomposition impurities of a high purity organometallic compound; and also an analysis method of trace impurities in a high purity organometallic compound using the treating liquid.;SOLUTION: The problems to be solved in the present invention is solved by a treating liquid for analysis of a high purity organometallic compound having a metal concentration of 0.001 to 1 mass% by using an aqueous acidic solution after decomposition treatment of the high purity organometallic compound with an aqueous inorganic acid solution and an organic solvent.;COPYRIGHT: (C)2012,JPO&INPIT