POROUS QUALITY SILICON CARBIDE CERAMIC SINTERED COMPACT HAVING CONDUCTIVITY

摘要

PROBLEM TO BE SOLVED: To provide a silicon carbide ceramic sintered compact which can be manufactured by a simple process, and can take various specific resistances in a wide range.;SOLUTION: The porous quality silicon carbide ceramic sintered compact having conductivity has a silicon dioxide layer formed on a particle surface. Moreover, the silicon dioxide layer is formed having 0.4-4.8 mass% of an oxygen concentration. Further, the silicon carbide ceramic sintered compact can be formed to have a honeycomb structure which includes two or more cells partitioned by a partition which are sequentially arranged extending in a single direction.;COPYRIGHT: (C)2012,JPO&INPIT