METHOD FOR CONTROLLING DEW POINT TEMPERATURE OF LOCAL LOW DEW POINT CHAMBER AND CONTROL SYSTEM OF THE SAME

摘要

PROBLEM TO BE SOLVED: To maintain a low dew point of a local low dew point chamber at a small amount of the supply of low dew point air even while a carry-in/carry-out door is opened, and to reduce cost.SOLUTION: For the local low dew point chamber 3 residing in a low dew point chamber 2 whose indoor atmosphere is maintained at a predetermined dew point temperature, and having indoor condition maintained at a dew point temperature lower than that of the low dew point chamber 2 and having the carry-in/carry-out door 4 for carrying in and out articles to and from the low dew point chamber 2, control is performed to maintain the indoor condition of the local low dew point chamber 3 at the low dew point while the carry-in/carry-out door 4 is opened. Specifically, an air curtain 5 for blowing low dew point air is provided along an opening face at one side of an opening of the carry-in/carry-out door 4, and at least when the carry-in/carry-out door 4 is opened, the low dew point air is blown from the air curtain 5, and an air temperature of the low dew point air blown from the air curtain 5 is adjusted so that a difference between an air temperature of the low dew point air blown from the air curtain 5 and an air temperature of indoor air of the low dew point chamber 2 becomes minimum.