MANUFACTURING METHOD OF MICROCHIP WITH ELECTRODE, AND MICROCHIP WITH ELECTRODE MANUFACTURED BY THE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a microchip with electrodes in which adhesion of two substrates including electrode portions can be firmly performed without remaining of foreign matter in a flow passage at all and the manufacturing cost can be reduced, and to provide the microchip with electrodes manufactured by the manufacturing method.;SOLUTION: Disclosed is the manufacturing method of a microchip with electrodes which is manufactured by joining two substrate members with each other and has at least the flow passage and the electrodes connected to the flow passage on the joining surface. The manufacturing method includes: a step of joining the two substrate members with each other; a first joining step of joining portions other than the vicinity of the electrodes of the substrate members; and a second joining step of joining the portions in the vicinity of electrodes of the substrate members. The microchip is provided which is manufactured by the manufacturing method.;COPYRIGHT: (C)2012,JPO&INPIT