Ion beam generating method and ion beam generating apparatus for carrying out the same

摘要

PROBLEM TO BE SOLVED: To provide a simple and versatile method for making an ion beam carry a high current, as to an ion beam generating device used for a device for analyzing an atomic arrangement on a surface and an interface by using a helium ion beam.;SOLUTION: The ion beam generating device is composed of a high frequency discharge tube 1 to generate helium plasma by high frequency discharge, a laser generating device 13 capable of adjusting a wavelength and carrying out optical pumping, a laser irradiating device to irradiate laser light from the laser generating device to the inside of the high frequency discharge tube, and an observing device to observe the wavelength of laser light. In this ion beam generating method, laser light having a wavelength of 1083 nm is irradiated into the helium plasma generated by high frequency discharge to carry out optical pumping.;COPYRIGHT: (C)2008,JPO&INPIT