Production manner and the micro mechanical component null substrate of the micro

摘要

Providing a micromechanical device and a method of manufacturing a micromechanical device, such as: having a membrane structure and the substrate. That is, it is the (relative pressure sensor or absolute pressure sensor) microphone, a pressure sensor or a micro speaker in particular, is performed only fabrication steps compatible with the circuit to be monolithically integrated on a substrate to form a membrane structure, the membrane structure To form, is to provide a micromechanical device and a method of manufacturing a micro-mechanical device to remove the sacrificial structure provided on the substrate.