STANDARD GAUGE, METHOD FOR GUARANTEEING MEASURING ACCURACY OF MEASURING INSTRUMENT, METHOD FOR MANUFACTURING STANDARD GAUGE, AND METHOD FOR EVALUATING PERFORMANCE OF MEASURING INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To provide a standard gauge capable of guaranteeing the measuring accuracy even in a case where the luster on the surface of a measuring object by a non-contact type three-dimensional measuring instrument is different, and to provide a method for guaranteeing the measuring accuracy of the measuring instrument, a method for manufacturing the standard gauge, and a method for evaluating the performance of the measuring instrument.;SOLUTION: A standard gauge G1 is configured by assembling 12 flat plates from a flat plate (a) to a flat plate (j) that have different integrated reflectances SCI and diffuse reflectances SCE respectively, when incident light is applied to the object at a prescribed intensity. The integrated reflectance is obtained by measuring a ratio of the intensities of both of specular reflection light and diffuse reflection light to the intensity of the incident light, and the diffuse reflectance is obtained by measuring a ratio of only the intensity of the diffuse reflection light to the intensity of the incident light.;COPYRIGHT: (C)2012,JPO&INPIT