The micro scanner and the light scanning device which has that.

摘要

PPROBLEM TO BE SOLVED: To provide a microscanner, improving curvature of a connected part connecting a variable part and a movable frame for enlarging a turning angle of the variable part that can prevent breakage of the connecting part due to stress, and to provide an optical scanner that is equipped with the microscanner. PSOLUTION: In this microscanner, a mirror part 3 is supported on movable frames 5a, 5b by main shaft parts 4a, 4b, unimorph driving parts 6a, 6b are formed to clamp the main shaft 4a on the movable frame 5a, and unimorph driving parts 6c, 6d are also formed to clamp the main shaft part 4b on the movable frame 5b. The area between the unimorph driving parts 6a and 6b and an area between the unimorph driving parts 6c and 6d serve as a connected part 7, connected to each one end of the main shaft parts 4a, 4b. The connected part 7 is provided with a bent part 8, formed of groove parts 81, 82 which are parallel to the axis of rotation of the mirror (X axis). PCOPYRIGHT: (C)2009,JPO&INPIT