The measuring method which measures the form of suffering inspection ones, being the measuring method which measures the form of aforementioned suffering inspection ones making use of the interference fringes

摘要

PROBLEM TO BE SOLVED: To provide an interference measuring method which can measure an aspherical shape by simple processing.;SOLUTION: The measuring method measuring the shape of a specimen using interference fringes obtained by reference light from a reference surface and light from the specimen comprises: steps S103 to S105 for converting a first interference fringe into a first shape of the specimen; steps S107, S108 for acquiring a second interference fringe at a position at which the specimen has moved in the direction of an optical axis; a step S109 for aligning the phases of the first and second interference fringes at a standard point with each other and unwrapping the second interference fringe; a step S110 for converting the unwrapped second interference fringe into a second shape of the specimen; a step S111 for determining whether or not the first shape and the second shape of the specimen match; and a step S112 for, when determined that they do not match, adding an integral multiple of the wavelength of a light source to the unwrapped second interference fringe to calculate the shape of the specimen.;COPYRIGHT: (C)2009,JPO&INPIT