MICROMIRROR DEVICE AND METHOD OF MANUFACTURING THREE-DIMENSIONAL REGULAR ARRAY POROUS BODY USED FOR MICROMIRROR DEVICE

摘要

PROBLEM TO BE SOLVED: To improve rigidity while suppressing increase in weight of a mirror substrate to a minimum, in a micromirror device having the mirror substrate which is vibrated in a reciprocating manner, and to surely prevent dynamic deformation of the mirror substrate even in the case where the mirror substrate is vibrated at high speed in the reciprocating manner.;SOLUTION: A mirror substrate 103 is supported by a pair of twist beams 102 so as to be oscillated, and vibrated in a reciprocating manner with the twist beams 102 as a torsion rotary axis. On a rear surface of the mirror substrate opposite to a light reflection plane, a structure reinforcing member 104 is provided for suppressing dynamic deformation of the mirror substrate 103, and comprised of a three-dimensional regular array porous body. The three-dimensional regular array porous body is a so-called inverse oval structure obtained by forming a close-packed structure with a number of fine particles, thereafter filling a void with a substance comprised of a material different from the fine particles, solidifying the substance and then selectively removing the fine particles to leave an area occupied with the fine particles as a void.;COPYRIGHT: (C)2012,JPO&INPIT