FINE METAL DETECTION DEVICE PROVIDED WITH HIGH PERFORMANCE MAGNETIC SHIELD AND ULTRA SENSITIVE MAGNETIC SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a fine metal detection device capable of detecting a fine metal foreign substance of a magnetic material that contaminates an inspection object.;SOLUTION: A fine metal detection device 1 comprises magnetizing means that magnetize a metal foreign substance in a direction aligned to a direction of magnetism detected by a flux gate sensor 50 through setting an inspection object 2 in an opposing manner, supporting means 3 capable of keeping a constant clearance between the inspection object and the flux gate sensor 50 while supporting the inspection object 2 after passing through the magnetizing means, a magnetic detection unit 5 including the flux gate sensor 50 capable of detecting magnetism of max 50pT/√(Hz), and a PC permalloy shield 6b for blocking magnetism and covering the magnetic detection unit 5 and an aluminum shield 6a for blocking high frequency.;COPYRIGHT: (C)2012,JPO&INPIT