The heat treatment conditional memory expedient which remembers the heat treatment condition for including

摘要

PROBLEM TO BE SOLVED: To provide a heat treatment system, a heat treatment method, and a program which adjust a treatment temperature easily.;SOLUTION: A temperature calculating computer 4 of the heat treatment system includes a device DB42 for storing a temperature correcting table that, in units of heat treatment units, indicates the relation between an accumulated film thickness of an adherend adhering to the interior of the unit and a temperature correction rate for each temperature (treatment temperature) inside the heat treatment unit. A temperature correction rate is specified based on the temperature correction table, treatment temperature, and accumulated film thickness, and optimizing value is calculated from the specified temperature correction rate.;COPYRIGHT: (C)2008,JPO&INPIT