Multilayer gas sensor element, a gas sensor with a multilayer gas sensor element, and a method for manufacturing a multilayer gas sensor element

摘要

PROBLEM TO BE SOLVED: To provide a technology capable of further suppressing the occurrence of cracks in a gas sensor element by water splash.;SOLUTION: A laminated gas sensor element has a structure laminating a detection element with a pair of electrodes on a solid-state electrolyte and a heater element with a resistance heating element therein. The distal end of the laminated gas sensor element exposed to at least a gas to be measured has a porous protective layer formed. There are ten or more of small holes with a diameter of ≥1 and ≤5 μm and an aspect ratio of ≥0.5 and ≤2.0 in a region with 50×50 μm, and ≥1 and 20 of large holes with a diameter of ≥8 and ≤20 μm and an aspect ratio of ≥0.5 and ≤2.0 in a region with 100×100 μm.;COPYRIGHT: (C)2011,JPO&INPIT