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Variation simulation system, variation determination model method and apparatus, and program

机译:变异仿真系统,变异确定模型方法,装置和程序

摘要

Disclosed is a variation simulation system including a variation analysis unit that acquires the results of statistical analysis of variations of characteristics of a plural number of target devices, a model analysis unit that acquires the results of analysis showing how the characteristics respond to variations of a parameter with respect to a model for simulation that simulates each target device, a fitting execution unit that collates the results obtained by the variation analysis unit to those obtained by the model analysis unit and determines the manner of variations of the parameter in order to reproduce the variations of each target device in accordance with the model, and a result output unit that outputs the information on the manner of variations of the parameter determined by the fitting execution unit. A transformation matrix is determined by multiplying a pseudo inverse matrix of a response matrix, a matrix made up of principal component vectors and an arbitrary unitary matrix.
机译:公开了一种变异仿真系统,其包括:变异分析单元,其获取多个目标设备的特征的变异的统计分析的结果;模型分析单元,其获得示出所述特征如何响应参数的变异的分析结果的模型分析单元。关于模拟每个目标设备的用于仿真的模型,拟合执行单元,其将变化分析单元获得的结果与模型分析单元获得的结果进行核对,并确定参数的变化方式以再现变化结果输出单元根据模型对每个目标设备的参数进行调整,结果输出单元输出关于由拟合执行单元确定的参数的变化方式的信息。通过将响应矩阵的伪逆矩阵,由主分量矢量组成的矩阵和任意unit矩阵相乘来确定变换矩阵。

著录项

  • 公开/公告号JP5006214B2

    专利类型

  • 公开/公告日2012-08-22

    原文格式PDF

  • 申请/专利号JP20070557743

  • 发明设计人 竹内 潔;

    申请日2006-11-16

  • 分类号G06F19;H01L21/8234;H01L27/088;H01L29;G06F17/50;

  • 国家 JP

  • 入库时间 2022-08-21 17:39:54

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