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Microstructure, a method of manufacturing the microstructure, and the polymerizable resin composition of the microstructure for the preparation
Microstructure, a method of manufacturing the microstructure, and the polymerizable resin composition of the microstructure for the preparation
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机译:微结构,微结构的制造方法以及用于制备的微结构的可聚合树脂组合物
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摘要
PROBLEM TO BE SOLVED: To provide a method for producing a fine structure by which a resin film for transferring a fine uneven pattern is formed on a substrate very thinly and uniformly, and defects can be reduced.;SOLUTION: In the method for producing a fine structure 10, the resin film 8 is formed by coating a liquid polymerizable resin composition containing a high molecular weight component, low molecular weight component, and reactive diluent component on an adhesion promoting layer 7 formed on the substrate 6, and a mold 5 having the fine uneven pattern formed thereon is pressed to the resin film 8 to transfer the uneven pattern. A constituent component of the adhesion promoting layer 7, the high molecular weight component, the low molecular weight component, and the reactive diluent component, respectively have functional groups that are crosslinkable with each other.;COPYRIGHT: (C)2011,JPO&INPIT
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