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Microstructure, a method of manufacturing the microstructure, and the polymerizable resin composition of the microstructure for the preparation

机译:微结构,微结构的制造方法以及用于制备的微结构的可聚合树脂组合物

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a fine structure by which a resin film for transferring a fine uneven pattern is formed on a substrate very thinly and uniformly, and defects can be reduced.;SOLUTION: In the method for producing a fine structure 10, the resin film 8 is formed by coating a liquid polymerizable resin composition containing a high molecular weight component, low molecular weight component, and reactive diluent component on an adhesion promoting layer 7 formed on the substrate 6, and a mold 5 having the fine uneven pattern formed thereon is pressed to the resin film 8 to transfer the uneven pattern. A constituent component of the adhesion promoting layer 7, the high molecular weight component, the low molecular weight component, and the reactive diluent component, respectively have functional groups that are crosslinkable with each other.;COPYRIGHT: (C)2011,JPO&INPIT
机译:解决的问题:提供一种用于制造精细结构的方法,通过该方法,在基板上非常薄且均匀地形成用于转印精细凹凸图案的树脂膜,并且可以减少缺陷。在微细结构10中,通过在形成于基板6上的粘合促进层7上涂布含有高分子量成分,低分子量成分和反应性稀释剂成分的液态聚合性树脂组合物和具有以下结构的模具5,来形成树脂膜8。在其上形成的精细凹凸图案被压到树脂膜8上以转印凹凸图案。增粘层7的组成成分,高分子量成分,低分子量成分和反应性稀释剂成分分别具有可彼此交联的官能团。; COPYRIGHT:(C)2011,JPO&INPIT

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