For forming the inorganic resist pattern, a method of manufacturing an optical disk master manufacturing method for manufacturing method and optical disk substrate of an optical disk stamper

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an inorganic resist pattern in which the taper angle of a pattern projecting part can be arbitrarily adjusted.;SOLUTION: The method for manufacturing the inorganic resist pattern comprises a step of forming an inorganic resist layer 3 composed of a metal oxide on a substrate 1, a step of forming a latent image 3a of a prescribed shape by irradiating the inorganic resist layer 3 with a laser beam 3b, and a step of forming the rugged pattern of the inorganic resist layer 3 in which the portion formed with the latent image 3a is a recessed part on the substrate 1 by developing the inorganic resist layer 3. The taper angle θ of the projecting shape of the rugged pattern is controlled by the amount of the oxygen included in the metal oxide. In concrete terms, the taper angle θ of the pattern projecting shape can be formed smaller (gentler) by reducing the amount of the oxygen included in the metal oxide, and the taper angle of the pattern projecting shape can be formed greater (steeper) by increasing the amount of the oxygen.;COPYRIGHT: (C)2008,JPO&INPIT