Protective layer for the exhaust gases of high temperature exhaust gas sensor for ChemFET

摘要

The present invention has at least one sensitive components (3), the masking layer comprising a degradable material does not remain on the thermal (31) provided on the above structure sensitive member (3), the above-sensitive components and (3) covered almost completely by the masking layer (31), a protective layer made of a temperature-stable material on said masking layer (31) and (33) is provided, said masking layer (31) thermally decomposable or a method of manufacturing a sensor element (1) to be removed by oxygen plasma for low temperature operation. The present invention further comprises at least one sensitive components (3) and temperature stability of the protective layer made of a material (33), construction of the sensitive member (3) is made of the temperature stability of the material covered by the protective layer (33), component (3) and the protective layer of the sensitivity (33) are spaced from one another, to the sensor element.