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Polycyclic ester containing electron-withdrawing substituent and lactone skeleton, polymer compound thereof, and photoresist composition

机译:含有吸电子取代基和内酯骨架的多环酯,其高分子化合物和光致抗蚀剂组合物

摘要

PPROBLEM TO BE SOLVED: To provide a novel polycyclic ester which contains an electron-withdrawing substituent and a lactone skeleton and is useful as a monomer component etc. of a highly functional polymer etc., a polymer compound and a photoresist resin composition. PSOLUTION: The polycyclic ester containing an electron-withdrawing substituent and a lactone skeleton is represented by formula (1) (wherein RSPa/SPis a hydrogen atom, a 1-6C alkyl group or the like optionally having a halogen atom; RSP1/SPis a halogen atom, a 1-6C alkyl group or the like optionally having a halogen atom; and A is a 1-6C alkylene group, an oxygen atom, a sulfur atom or no bond). PCOPYRIGHT: (C)2009,JPO&INPIT
机译:

要解决的问题:提供一种新型的多环酯,其包含吸电子取代基和内酯骨架,并可用作高官能度聚合物等的单体成分等,高分子化合物和光致抗蚀剂树脂组合物。

解决方案:含有吸电子取代基和内酯骨架的多环酯由式(1)表示(其中R SPa为氢原子,1-6C烷基等)任选地具有卤素原子; R SP 1是卤素原子,1-6C烷基等任选地具有卤素原子;和A是1-6C亚烷基,氧原子,a硫原子或无键)。

版权:(C)2009,日本特许厅&INPIT

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