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Polycyclic ester containing electron-withdrawing substituent and lactone skeleton, polymer compound thereof, and photoresist composition
Polycyclic ester containing electron-withdrawing substituent and lactone skeleton, polymer compound thereof, and photoresist composition
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机译:含有吸电子取代基和内酯骨架的多环酯,其高分子化合物和光致抗蚀剂组合物
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摘要
PPROBLEM TO BE SOLVED: To provide a novel polycyclic ester which contains an electron-withdrawing substituent and a lactone skeleton and is useful as a monomer component etc. of a highly functional polymer etc., a polymer compound and a photoresist resin composition. PSOLUTION: The polycyclic ester containing an electron-withdrawing substituent and a lactone skeleton is represented by formula (1) (wherein RSPa/SPis a hydrogen atom, a 1-6C alkyl group or the like optionally having a halogen atom; RSP1/SPis a halogen atom, a 1-6C alkyl group or the like optionally having a halogen atom; and A is a 1-6C alkylene group, an oxygen atom, a sulfur atom or no bond). PCOPYRIGHT: (C)2009,JPO&INPIT
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