Cleaning apparatus applicator, method of manufacturing the coating method and coating apparatus, as well as members for liquid crystal displays

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a member of a liquid crystal display which is capable of sufficient cleaning, even if a cleaning liquid and a gas are spouted at the same time, and which allows enhancement of cleaning efficiency, by appropriately positioning spout openings of the cleaning liquid and spout openings of the gas, so that due to these effects, the member of a liquid crystal display can be manufactured with high quality and at low cost.;SOLUTION: The method of cleaning a coating machine for cleaning at least a discharge opening face of the coating machine, provided with discharge openings which extend or are aligned in the longitudinal direction to discharge coating liquids and a face adjacent to the discharge opening face (these faces are generically called face to be cleaned). The method comprises a step of arranging a cleaning device which has a plurality of outflow openings of cleaning liquid, and a gas-spouting device which has a plurality of gas spout openings, to align in the longitudinal direction of the coating machine; and supplying the cleaning liquid from the cleaning device toward an adjacent face, and subsequently spouting a gas from the gas spouting device to the adjacent face, while driving the cleaning device and gas spouting device to sweep in the longitudinal direction, thereby performing cleaning of the face to be cleaned.;COPYRIGHT: (C)2008,JPO&INPIT