METHOD OF MANUFACTURING TOUCH PANEL INPUT DEVICE, PIEZOELECTRIC ELEMENT, AND TOUCH PANEL INPUT DEVICE

摘要

PROBLEM TO BE SOLVED: To achieve tactile feedback such that transparency is high, a touch position and depression of touch input are detected, and the touch position is locally vibrated.SOLUTION: A method of manufacturing the touch panel input device includes the processes of: (a) forming a first contact layer on a growth substrate; (b) forming a second contact layer on the first contact layer; (c) removing only the second contact layer from a selected region on a second contact layer surface by irradiating the selected region with laser light; (d) forming a growth ground layer on the region from which the second contact layer is removed and the second contact layer; (e) forming an oxide thin film with piezoelectricity on the growth ground layer; (f) bonding together the growth substrate on which the oxide thin film layer is grown and a second substrate on which a first transparent electrode is formed; (g) peeling the oxide thin film layer from an interface between the first contact layer and the growth ground layer in only the region from which the second contact layer is removed, and transferring the oxide thin film layer to the second substrate; and (h) bonding the second substrate to a third substrate on which a second transparent electrode is formed with the transferred oxide thin film layer sandwiched.