Being chemical vapor phase permeation modulo in order to elaborate the porous backing material with the chemical

摘要

You can insert into the oven the porous backing material (10), of one or more for elaborating there, with the carrier gas which at least includes the gas of 1 where it is selected from the methane and the inert gas kinds you can insert the pyrocarbon precusor gas which at least includes the hydrocarbon C _{xH of the} vapor of 1 kinds _y (here, as for x and y to be integer, as for x 1x6 is filled up,). At the same time with the residual component of the gas which was inserted, the waste gas which contains the reaction product which includes hydrogen is removed from the oven, is removed from the waste gas and at least portion of the gases style which contain the pyrocarbon precusor reagent gas, is recycled to the reaction gas which is inserted into the oven (circuit 80). Recycling is executed after the removal (processing 40) of the heavy hydrocarbon which is contained in the waste gas. Selective figure Figure 1