The Ca content copper alloy target null Ca which is used with membrane manner and this membrane manner of the copper alloy composite membrane which is superior in

摘要

PROBLEM TO BE SOLVED: To provide a film deposition method of a copper alloy compound film having excellent adhesiveness.;SOLUTION: Sputtering is executed in the inert gas atmosphere containing 1-20 vol.% oxygen by using a Ca containing copper alloy target having the component composition consisting of 0.06-14 mol% Ca, and the balance Cu with inevitable impurities, and a copper alloy base film containing oxygen-Ca having the component composition containing 0.01-2 mol% Ca and 1-20 mol% oxygen is deposited. Successively, the supply of oxygen is stopped and the sputtering atmosphere is formed to be the inert gas atmosphere. By executing the sputtering in the inert gas atmosphere, a Ca-containing copper alloy conductive film having the component composition containing 0.01-2 mol% Ca and the balance Cu with inevitable impurities is deposited.;COPYRIGHT: (C)2009,JPO&INPIT