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Light shielding material, method for producing light shielding material, ultraviolet absorbing film, infrared absorbing film, photomask, and electromagnetic wave shielding film
Light shielding material, method for producing light shielding material, ultraviolet absorbing film, infrared absorbing film, photomask, and electromagnetic wave shielding film
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机译:遮光材料,遮光材料的制造方法,紫外线吸收膜,红外线吸收膜,光掩模和电磁波屏蔽膜
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摘要
A light shielding member having an excellent surface hardness, a manufacturing method thereof, an ultraviolet absorption film, an infrared absorption film, a photo mask, and an electromagnetic wave shielding film are provided to improve a surface hardness and a light shielding performance of a light fastness etc by forming a light shielding member including a polymer layer by a surface graft polymerization. A compound having an unsaturated part and a part absorbing a metal ion or a metal salt is contacted on a member capable of generating a radical by a light. A polymer layer coupled on the member is generated by performing an exposure process. A metal ion or a metal salt is supplied to the polymer layer. A metal particle is educed by reducing the metal ion among the metal ion and the metal salt. One among a multivalent metal cross-linking process, a chemical modification, and an acid process is performed about a metal salt structure of one valence.
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