Integrated pressure sensor having a double measurement scale and high full-scale value

摘要

The monolithic body of the semi-conducting material (16), the 1st main surface (16a), the bulk territory (17), and pressure (P) the sensor amount which operates (33) it possesses the pressure sensor which possesses the double measurement scale (15) in, the cavity (18), the monolithic body (16) forms, at the same time possesses flexibiility and the 1st main surface (16a) from it separates the deformation possible thin film (19) due to pressure (P) according to, in addition sensor amount (33) arranges inside, it encircles the bulk territory (17) due to,Pressure (P) 1st value the low pressure detection element of perception possible piezoelectric resistant type (28), the thin film (19) it integrates, this low pressure detection element (28) possesses rheostat the thin film (19) as a function of deformation. Furthermore, in the same way the high pressure detection element of piezoelectric resistant type (29), sensor amount (33) the bulk territory inside (17) it forms, this high pressure detection element (29) it possesses rheostat pressure (P) as a function. The high pressure detection element (29) pressure (P) 2nd value is made perception possible.