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Ion detection device for mass spectrometry, ion detection method, and method of manufacturing ion detection device

机译:质谱法的离子检测装置,离子检测方法及离子检测装置的制造方法

摘要

The present invention provides an ion detection apparatus, an ion detection method, and ion detection that can improve the effect of reducing stray light while improving the effect of an electric field for drawing ions to be detected to the first stage electrode of a secondary electron multiplier. An apparatus manufacturing method is provided. In one embodiment of the present invention, an ion detection apparatus including a secondary electron multiplier having a plurality of electrodes and a drawing electrode for drawing ions to the first stage electrode side of the secondary electron multiplier. When introducing ions into the ion detector, the amount of light incident on the first electrode of internal stray light generated inside the ion detector is less than or equal to the amount of light incident on the first electrode of external stray light generated outside the ion detector. As such, at least one of the area of the drawing electrode and the potential difference between the drawing electrode and the surrounding electrode that is not the electrode of the secondary electron multiplier tube but the surrounding electrode is set.
机译:本发明提供了一种离子检测装置,离子检测方法和离子检测,其能够提高减少杂散光的效果,同时改善用于将待检测离子吸引到二次电子倍增器的第一级电极的电场的效果。 。提供一种设备制造方法。在本发明的一个实施例中,一种离子检测装置,包括:具有多个电极的二次电子倍增器;以及用于将离子吸引到二次电子倍增器的第一级电极侧的引出电极。当将离子引入离子检测器时,入射在离子检测器内部的内部杂散光的第一电极上入射的光量小于或等于入射在离子检测器外部的外部杂散光的第一电极上入射的光量。 。这样,设置了引出电极的面积和引出电极与不是二次电子倍增管的电极而是周围电极的周围电极之间的电势差中的至少一个。

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