Stepping motor drive, precision measurement equipment, precision machining equipment, and micro-step driving method

摘要

PROBLEM TO BE SOLVED: To use a conventional electronic circuit to segment the resolution of a stepping motor, and at the same time to reduce a grating audible sound produced at the time of rotational driving and at the time of hold.;SOLUTION: A stepping motor driving device includes: an electrical angle position managing means 12a having a basic step counter for counting the number of times of stepping of a stepping motor in a basic step and a number of times dividing step counter for counting the number of times of stepping in number of times divided step, obtained by dividing a basic step angle by m; an excitation phase combination outputting means 12b for outputting a combination of a first excitation set (F1-F2) and a second excitation set (F3-F4) according to the number of times of stepping in basic step; a number of times of excitation ratio outputting means 12d that gradually increases or decreases the number of times of exciting the first excitation set and gradually decreases or increases the number of times of exciting the second excitation set according to the number of times of stepping in number of times dividing step and thereby determines the ratio of the number of times of excitation of the first excitation set to that of the second excitation set; and an excitation waveform outputting means 12e that successively outputs excitation waveform dispersed so that the first excitation set does not constantly occur relative to the second excitation set in a simple cycle with a predetermined ratio of the number of times of excitation maintained, in an excitation cycle T.;COPYRIGHT: (C)2008,JPO&INPIT