The optical modulator and the production manner and modulation optical system being the optical inter- connection device and the optical communication device null optical

摘要

PROBLEM TO BE SOLVED: To provide a small-sized optical modulator with high sensitivity which has an ultra-high speed optical modulation characteristics exceeding 40 GHz bandwidth and is usable, even for optical wiring etc.;SOLUTION: Laser light 11, emitted by a vertical resonator surface light emission semiconductor laser (VCSEL) 10, is made incident on a flank of an optical waveguide 12 near its end. The end of the optical waveguide 12 is tapered by polishing to 45, and an optical modulator 15 is formed on the polished surface. The optical modulator is a Fabry-Perot etalon type modulator, using primary electrooptical effect and a thick transparent electrooptical layer is formed by using aerosol deposition method.;COPYRIGHT: (C)2006,JPO&NCIPI