The canonical component and its production manner for proofreading, and the electron beam device null which uses

摘要

PROBLEM TO BE SOLVED: To provide a standard member for calibration capable of specifying easily a calibration position in order to calibrate accurately a magnification in an electron beam device, and the electron beam device using it.;SOLUTION: Highly-accurate length measurement calibration capable of specifying the calibration position can be realized by forming a mark or a label for specifying the calibration position near a super-lattice pattern of the standard member for device calibration. In the standard member for calibration for calibrating the magnification of the electron beam device based on a signal of secondary charged particles detected by irradiating a primary electron beam 11 emitted from the electron beam device onto a substrate 1 having a section of a super-lattice pattern of a laminated structure formed by laminating alternately different materials 4, 5, the substrate has linear patterns 3 arrayed at fixed intervals in a crossing direction to the super-lattice pattern section on the substrate surface in parallel with the lamination, and the section of the linear pattern 3 is constituted to be approximately in the same plane as the super-lattice section, and the position of the super-lattice pattern is specified by the linear pattern.;COPYRIGHT: (C)2009,JPO&INPIT