首页> 外国专利> Surface plasmon sensor, the incident angle calculation unit, a surface plasmon sensor system, the incident angle calculation program, and the incident angle calculation program computer-readable recording medium recording the

Surface plasmon sensor, the incident angle calculation unit, a surface plasmon sensor system, the incident angle calculation program, and the incident angle calculation program computer-readable recording medium recording the

机译:表面等离激元传感器,入射角计算单元,表面等离激元传感器系统,入射角计算程序和入射角计算程序

摘要

PROBLEM TO BE SOLVED: To correct a measurement error due to tilt and height change in a sensor chip by using a simple configuration, when exchanging the sensor chip.;SOLUTION: A system includes; a prism 5 having translucency to a wavelength of a light beam 12 emitted from a light source 2; a metal film 6a formed on a surface of the prism 5 on the opposite side of the incidence side of the light beam 12; a dielectric film 6b formed on the first metal film 6a; a second metal film 6c formed on the dielectric film 6b; and a photodetector 8 for detecting reflection light generated by multiple reflections of the light beam 12 passing through the prism 5 at incidence angles of a prescribed range on all interfaces which are formed between the prism 5 and the first metal film 6a, between the first metal film 6a and the dielectric film 6b, between the dielectric film 6b and the second metal film 6c, and between the second metal film 6c and a sample 13. The reflection coefficient of the reflection light detected by the photodetector 8 contains three or more local minimal values.;COPYRIGHT: (C)2010,JPO&INPIT
机译:解决的问题:更换传感器芯片时,通过使用简单的配置来纠正由于传感器芯片的倾斜和高度变化而引起的测量误差。棱镜5对从光源2射出的光束12的波长具有透光性。金属膜6a形成在棱镜5的光束12的入射侧的相反侧的表面上。在第一金属膜6a上形成的电介质膜6b。在电介质膜6b上形成第二金属膜6c。光电检测器8,用于检测在第一金属之间在棱镜5与第一金属膜6a之间形成的所有界面上,以预定范围的入射角通过棱镜5的光束12的多次反射所产生的反射光。膜6a和介电膜6b之间,介电膜6b和第二金属膜6c之间以及第二金属膜6c和样品13之间。由光电检测器8检测到的反射光的反射系数包含三个以上的局部极小值。值:;版权:(C)2010,日本特许厅和INPIT

著录项

  • 公开/公告号JP5020901B2

    专利类型

  • 公开/公告日2012-09-05

    原文格式PDF

  • 申请/专利权人 シャープ株式会社;

    申请/专利号JP20080189921

  • 发明设计人 北澤 田鶴子;

    申请日2008-07-23

  • 分类号G01N21/27;

  • 国家 JP

  • 入库时间 2022-08-21 17:37:08

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