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In the buffer tank which is provided on the middle of the buffer tank and the raw materials

机译:在设置在缓冲罐和原材料中间的缓冲罐中

摘要

PROBLEM TO BE SOLVED: To provide a buffer tank capable of not only separating the bubbles from the liquid material but also preventing quality deterioration of a stored liquid material by promoting discharge of bubbles upon injecting the liquid material again at the time of completing a maintenance work, preventing introduction of bubbles into the liquid and improving the airtight property.;SOLUTION: The buffer tank 8 provided halfway of a material passage 38 for pumping a liquid material 34 includes: a tank main body 76 with its bottom part inner surface shaped in a curved form protruding downward, for temporarily storing the liquid material; a material inlet port 78 formed in a side part of the tank main body; and a material outlet port 80 formed in a side part or a lower part of the tank main body.;COPYRIGHT: (C)2009,JPO&INPIT
机译:解决的问题:提供一种缓冲罐,该缓冲罐不仅能够从液体材料中分离出气泡,而且还能够通过在完成维护工作时再次注入液体材料来促进气泡的排出,从而防止储存的液体材料的质量下降。解决方案:缓冲罐8设置在用于泵送液体材料34的材料通道38的中途,该缓冲罐8包括:罐主体76,其底部内表面成形为底部。向下突出的弯曲形式,用于临时存储液体材料。在箱主体的侧部形成有材料入口78。储罐主体的侧面或下部形成有材料排出口80。版权所有:(C)2009,JPO&INPIT

著录项

  • 公开/公告号JP4946718B2

    专利类型

  • 公开/公告日2012-06-06

    原文格式PDF

  • 申请/专利权人 東京エレクトロン株式会社;

    申请/专利号JP20070210567

  • 发明设计人 諸井 政幸;仲野 哲也;

    申请日2007-08-11

  • 分类号H01L21/31;C23C16/448;

  • 国家 JP

  • 入库时间 2022-08-21 17:36:57

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