The microwave transmitted window, the microwave plasma generator and the transmitted window which consists of

摘要

PROBLEM TO BE SOLVED: To provide a microwave transparent window, a microwave plasma generator, and a microwave plasma processing apparatus by which the reproducibility of stationary waveform of microwaves formed in the transparent window is improved, so as to solve problems such as the uniformity of distribution or density of the generated plasma and a difference in reproducibility among the plasma processing apparatuses.;SOLUTION: The microwave transparent window is provided with a transparent window 30 made of dielectric, and a peripheral member 31 which is provided in such a manner as to be brought into contact with the entire circumference of the outer periphery of the transparent window 30 and is made of a material reflecting the microwave. The peripheral member 31 is provided with at least one movable joint part.;COPYRIGHT: (C)2007,JPO&INPIT