Synthesis of carbon nanotube, a silicon substrate, an electron source and a field emission display

摘要

PPROBLEM TO BE SOLVED: To provide a carbon nanotubes synthesis method by which oriented carbon nanotubes can be synthesized on a silicon substrate by uniformizing the particle diameter and the distribution of catalytic fine particles on the substrate. PSOLUTION: When the surface of a silicon substrate is treated with a straight chain hydrocarbon having an unsaturated bond at the terminal, such as octadecene, to have hydrophobicity and a hydrophilic surface is formed on the treated surface by using a surfactant, a polar solvent solution of a catalytic metal compound can be easily and uniformly applied on the hydrophilic surface. Then, thus obtained silicon substrate coated with the catalytic metal compound is dried and reduced. Thereafter, the oriented carbon nanotubes are synthesized by flowing a carbon source gas onto the substrate at a high temperature. PCOPYRIGHT: (C)2008,JPO&INPIT