Signal processing method of the liquid crystal array inspection device and a liquid crystal array inspection device

摘要

It is intended that as the standard deviation for calculating the reference value, calculates a standard deviation for each pixel instead of the standard deviation of the whole panel, calculates a reference value of each pixel based on the standard deviation. And calculates the reference value by which, corresponding to the fluctuations due to fluctuations of calculating the standard deviation corresponding to the fluctuation of the detected intensity, to be included in the detected intensity. The value in the reference value calculation process, based on the detected intensity of the neighboring pixels of the target pixel and the detected intensity of the target pixel, the average value of the detected intensity and the calculated standard deviation for the target pixel by pixel, multiplied by a predetermined coefficient to the standard deviation adds to the average value and a reference value obtained value. Thus, in the calculation of the reference value for determining the gray level, calculating a reference value corresponding to the variation due to fluctuations contained in the detected intensity, to improve the detection sensitivity of the defect detection by this.