Measurement method using the device and apparatus for performing optical measurement of an object

摘要

PROBLEM TO BE SOLVED: To provide measurement with higher precision, in a microscope with a focus regulating device and an optical measuring device with a light wave interferometer.;SOLUTION: The microscope is formed as a confocal automatic focusing microscope, and focus beams emitted from a light source are focused through an objective lens 12 on an object 1 and a focus detector 8, and then the focus detector 8 outputs the measured signal to a focus controller 17, linked with a focus regulating device 18 and the focus detector 8. Then by having a focus controller 17 control the focus-regulating device 18, in response to the measurement signal, the measuring point of the object 1 is positioned at the focus point of the objective lens 12. The light wave interferometer is a light source for producing the focus beams.;COPYRIGHT: (C)2006,JPO&NCIPI