Operation control manner of two step type reefers and operation control manner of the cryopump which uses two step type reefers, two step type reefers and cryopump

摘要

PROBLEM TO BE SOLVED: To respond to a case wherein the temperature of a first cooling stage cannot be raised to a target temperature upon controlling drive power source frequency of a two-stage refrigerator based on the temperature of the first cooling stage and enhancing operating efficiency of a cryopump.;SOLUTION: The cryopump includes a control means capable of heating the first cooling stage 6 and maintaining it at the target temperature when the temperature of the first cooling stage 6 does not rise to the target temperature even when the drive power source frequency is lowered to a minimum frequency within an operable range.;COPYRIGHT: (C)2009,JPO&INPIT