The element splitting the reliability evaluation device of metal wiring and record media null bamboo wiring which stores the program for reliability evaluation

摘要

PROBLEM TO BE SOLVED: To predict void formation and disconnection failure by a numerical simulation using electromigration (EM) damage control parameters of metal wiring.;SOLUTION: In the numerical simulation, the metal wiring is divided into elements. The distributions of current density and temperature are obtained by numerical analysis (S304). Atomic flux divergence AFDgen of respective elements is calculated, by using the distributions and physical property constants (S306) of materials predetermined by accelerated tests (S308). The volume reduction per one calculation step (S312) in the simulation is given, by multiplying by the volume of each element the time corresponding to a single calculation step, and the atomic volume corresponding to calculated AFDgen (S310). The thickness of each element is decreased based on the decrease in volume (S314). For an element, of which the thickness is decreased, it is indicated that voids have been formed. Numerical analysis on the distributions of current density and temperature in the metal wiring is performed again, taking into consideration the thickness of each element (S304). Calculations are performed repeatedly.;COPYRIGHT: (C)2008,JPO&INPIT