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Semiconductor materials and material removal system detection system for detecting the solid material in the plasma
Semiconductor materials and material removal system detection system for detecting the solid material in the plasma
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机译:半导体材料和材料去除系统检测系统,用于检测等离子体中的固体材料
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摘要
A method for solid material detection in a medium includes receiving an exhaust gas downstream with respect to a workpiece from which a photoresist material is removed. An electromagnetic circuit is configured to include the exhaust gas, the exhaust gas is excited with electromagnetic energy and an impedance value of the electromagnetic circuit is determined, wherein the impedance value corresponds to an amount of solid material within the exhaust gas.
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