PROBLEM TO BE SOLVED: To provide a technique to obtain a clear electronic image without using an energy filter in which formed charge on a sample surface can be suppressed when an insulator sample installed on the sample board is observed in the field of a radiation electron microscope technology, and provide the radiation electron microscope applying it.;SOLUTION: In the method for observing the sample surface by irradiating excitation light onto the insulator sample installed on the sample board and by making photoelectron or secondary electron emitted from the sample surface form an image by a projection type electronic optical system, and in a state that a high electric field or high magnetic field is impressed on the sample face, so that the neutralization electron reflected or elastically scattered after having accomplished antistatic function can be removed by an angle restriction diaphragm (contrast aperture diaphragm) simultaneously with the excitation light, this is the method for observing the insulator sample surface on which charged neutralization electron beam is irradiated in a diagonal direction against the image forming optical axis by adjusting electro-optical conditions of a beam polarizer or a beam separator.;COPYRIGHT: (C)2007,JPO&INPIT
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