Manufacturing method of cell electrophysiological sensor chip and cell electrophysiological sensor, using the same cell electrophysiological sensor chip

摘要

Cell electrophysiological sensor to measure the electrical change of the subject cells. Chip cellular electrophysiological sensor is provided with a thermal oxide film mainly the diaphragm, the silicon dioxide provided on the diaphragm. Diaphragm, and a silicon dioxide layer provided between the silicon layer, the upper surface of the silicon layer. Through hole passing through the silicon dioxide layer and silicon layer is provided. The through hole has an opening that opens in a silicon dioxide layer and to capture the specimen cell. It is provided on the inner wall surface of the through-holes, the thermal oxide film are integrated by melting with the silicon dioxide layer in the opening of the through hole. Even when there are variations in the performance of the subject cells, the cellular electrophysiological sensor chip can realize a giga-seal property can catch specimen cell stably.