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X-ray tube target, X-ray tube using the same, X-ray inspection apparatus, and method for manufacturing target for X-ray tube
X-ray tube target, X-ray tube using the same, X-ray inspection apparatus, and method for manufacturing target for X-ray tube
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机译:X射线管靶,使用该X射线管靶的X射线管,X射线检查装置以及X射线管靶的制造方法
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摘要
In the X-ray tube target (1) of the present invention, a carbon substrate (4) and a Mo substrate or Mo alloy substrate (2) are bonded via a bonding layer (3), and the bonding layer ( 3) comprises a MoNbTi diffusion phase (6), an NbTi alloy phase (7), an Nb rich phase (8), and a ZrNb alloy phase (9). Thereby, it became possible to provide the target for X-ray tubes which raised the joining strength under high temperature.
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