METHOD FOR IMPROVING ACCURACY OF PARASITICS EXTRACTION CONSIDERING SUB-WAVELENGTH LITHOGRAPHY EFFECTS

摘要

The present disclosure involves a method. The method includes decomposing a layout of a circuit into a plurality of patterns. The method includes generating a plurality of contours to represent the plurality of patterns after the patterns have been subjected to a manufacturing process. The method includes generating a plurality of polygons that approximate geometries of the contours, respectively. The method includes associating each of the polygons with a respective one of a plurality of pattern elements in a pattern library, wherein the pattern elements each include a shape that resembles the associated polygon and electrical parameters extracted from the shape. The method includes calculating electrical performance of the circuit based on the pattern elements associated with the polygons.