首页> 外国专利> METHOD AND DEVICE FOR A SPATIALLY RESOLVED INTRODUCTION OF AN INTENSITY PATTERN COMPRISING ELECTRO-MAGNETIC RADIATION INTO A PHOTOSENSITIVE SUBSTANCE AS WELL AS APPLICATIONS THEREOF

METHOD AND DEVICE FOR A SPATIALLY RESOLVED INTRODUCTION OF AN INTENSITY PATTERN COMPRISING ELECTRO-MAGNETIC RADIATION INTO A PHOTOSENSITIVE SUBSTANCE AS WELL AS APPLICATIONS THEREOF

机译:空间分辨地将包含电磁辐射的光强图案引入光敏物质的方法和装置及其应用

摘要

A method for the spatially resolved introduction of an intensity pattern of electro-magnetic radiation by at least one optic display system into a photosensitive substance having properties which can be changed by photon exposure. These properties include a first, liquid and at least one second state, with the electro-magnetic radiation being conducted via the optic display system into the photosensitive substance and here being projected on predetermined spatial coordinates, in order to create at or in an area of these spatial coordinates a change of the properties of the substance. A surface of an objective lens of the optic display system, through which the electro-magnetic radiation 4 is emitted, is immersed in the liquid photosensitive substance 2. A corresponding device is provided, and the device and method can be used for the creation of micro or nano-scaled structures.
机译:一种用于在空间上分辨通过至少一个光学显示系统将电磁辐射的强度图案引入具有可通过光子曝光改变的特性的光敏物质的方法。这些特性包括第一状态,液体状态和至少一个第二状态,其中电磁辐射通过光学显示系统传导到光敏物质中,并在此投射到预定的空间坐标上,以便在以下区域或​​区域内创建这些空间坐标改变了物质的性质。光学显示系统的物镜表面通过其发射电磁辐射 4 的表面浸入液态光敏物质 2中。提供,并且该装置和方法可用于创建微米或纳米级结构。

著录项

  • 公开/公告号US2012218535A1

    专利类型

  • 公开/公告日2012-08-30

    原文格式PDF

  • 申请/专利权人 MICHAEL THIEL;HOLGER FISCHER;

    申请/专利号US201213405616

  • 发明设计人 MICHAEL THIEL;HOLGER FISCHER;

    申请日2012-02-27

  • 分类号G03B27/42;

  • 国家 US

  • 入库时间 2022-08-21 17:33:03

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