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Optical devices and digital laser method for writing waveguides, gratings, and integrated optical circuits

机译:用于写入波导,光栅和集成电路的光学装置和数字激光方法

摘要

The invention relates to devices having periodic refractive index modulation structures and fabrication methods for the devices using a laser means. By focusing a pulsed laser beam into a transparent material substrate, a path of laser modified volumes can be formed with modified refractive index compared with the unprocessed material. By selecting appropriate laser parameters and relative scan speed, the laser modified path defines an optical waveguide. Separation distance of the individual modified volumes define a periodic modification pattern along the waveguide path, so that the waveguide structures also exhibit grating responses, for example, as spectral filters, Bragg reflectors, grating couplers, grating sensors, or other devices. This method of direct laser fabrication enables one-step fabrication and integration of periodic or aperiodic refractive-index modulation devices together with optical waveguiding properties to enable low-cost, multifunctional 1D, 2D or 3D optical circuit fabrication for simple and complex applications.
机译:本发明涉及具有周期性折射率调制结构的器件以及使用激光装置的器件的制造方法。通过将脉冲激光束聚焦到透明材料基板中,与未经处理的材料相比,可以形成具有修改后的折射率的激光修改体积的路径。通过选择适当的激光参数和相对扫描速度,激光修改路径定义了一个光波导。各个修改体积的分离距离沿波导路径定义了周期性的修改模式,因此波导结构也表现出光栅响应,例如作为光谱滤波器,布拉格反射器,光栅耦合器,光栅传感器或其他设备。这种直接激光制造的方法可以一步制造,并且可以将周期性或非周期性的折射率调制设备与光波导特性集成在一起,从而可以实现用于简单和复杂应用的低成本多功能1D,2D或3D光电路制造。

著录项

  • 公开/公告号US8270788B2

    专利类型

  • 公开/公告日2012-09-18

    原文格式PDF

  • 申请/专利权人 PETER R. HERMAN;HAIBIN ZHANG;

    申请/专利号US20070301496

  • 发明设计人 PETER R. HERMAN;HAIBIN ZHANG;

    申请日2007-05-18

  • 分类号G02B6/34;B29D11/00;C03B37/018;H01L21/00;

  • 国家 US

  • 入库时间 2022-08-21 17:30:50

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